![]() ![]() Hence, it is widely used in materials science and engineering, geology, and biological research. EBSD can also be combined with energy-dispersive X-ray spectroscopy (EDS), cathodoluminescence (CL), and wavelength dispersive X-ray spectroscopy (WDS) for advanced phase identification and materials discovery.ĮBSD is a versatile and powerful technique that can provide valuable insights into the microstructure and properties of a wide range of materials. EBSD is applied for impurities and defect studies, plastic deformation, and statistical analysis for average misorientation, grain size, and crystallographic texture. Thus, EBSPs can be indexed to provide information about the material's grain structure, grains orientation, and phase at the micro-scale. EBSD spatial resolution depends on many factors, including the nature of the material under study and the sample preparation. As backscattered electrons leave the sample, they interact with the crystal's periodic atomic lattice planes and diffract according to Bragg's law at various scattering angles before reaching the phosphor screen forming Kikuchi patterns (EBSPs). In this configuration, the SEM incident beam hits the tilted sample. EBSD is carried out in a scanning electron microscope equipped with an EBSD detector comprising at least a phosphorescent screen, a compact lens and a low-light camera. ![]() An electron backscatter diffraction pattern of monocrystalline silicon, taken at 20 kV with a field-emission electron sourceĮlectron backscatter diffraction ( EBSD) is a scanning electron microscopy (SEM) technique used to study the crystallographic structure of materials. ![]()
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